Two-dimensional (2D) transition metal dichalcogenides MX2 (M = Mo, W, X = S, Se, Te) attracts enormous research interests in recent years. Its 2H phase possesses an indirect to direct bandgap transition in 2D limit, and thus shows great application potentials in optoelectronic devices. The 1T’ phase transition can drive the monolayer MX2 to be a 2D topological insulator. Here we realized the molecular beam epitaxial (MBE) growth of both the 1T’ and 2H phase monolayer WSe2. The crystalline structure of these two phases was characterized using scanning tunneling microscopy. The monolayer 1T’-WSe2 was found to be metastable, and can transform into 2H phase under post-annealing procedure. This thermo-driven crystalline phase transition makes the monolayer WSe2 to be an ideal platform for the controlling of topological phase transitions.

Published in: "arXiv Material Science".