Provided is a TFT structure based on a flexible multilayer graphene quantum carbon substrate material and manufacturing method. The TFT structure comprises a multilayer graphene quantum carbon substrate (1), a first source (10), a first drain (9), a first gate insulating layer (13), and a first gate (15). The multilayer graphene quantum carbon substrate (1) comprises a first channel region (51), and a first drain region (5) and a first source region (6) provided at corresponding mutually-separated recessed portions of the multilayer graphene quantum carbon substrate (1). The first channel region (51) is located between the first drain region (5) and the first source region (6); the first source region (6) is filled with the first source (10); the first drain region (5) is filled with the first drain (9); the first gate insulating layer (13) is disposed on the first channel region (51); the first gate (15) is disposed on the first gate insulating layer (13). According to the structure and the manufacturing method, the carrier mobility is higher, the flexible TFT can be prepared in a large scale at low costs, and manufacturing of a flexible electronic device is achieved.
Published in: "Patentscope".